The Fastmicro Sample Scanner is a surface particle contamination inspection tool for indirect measurements of particle count, size and location down to 0.5 micrometer particles using innovative 'tape-lift' samplers. These samplers or PMC cards facilitate flexible sampling on a variety of surfaces, including those that are difficult to reach or are unusually rough, without leaving any measurable residue. Quick and efficient, the scanner analyzes samples within seconds over a sample area of 225 mm², ensuring immediate and accurate results.

FM-PDS: multi-application modular platform

The modular Fastmicro Particle Defect Inspection System metrology platform can be customized to suit each production qualification process or to fit into a production line. This can include manual and automated wafer handling: package openers for inspection and cleaning, filling stations, robot arms, an inspection spot and a port for cleaning. 

The Fastmicro system allows for a scaled inspection surface to suit customer needs, without introducing extra imaging time and using limited floor space.

Fallout Scanner for particle deposition rate monitoring

The Fastmicro Fallout Scanner has been developed to measure the particle deposition rate in any industry. It can be used in both vacuum as well as ambient environments.

The scanner module is also available as a white label solution for system integrators.